The various plane, concave, convex, non spherical lens surface curvature fitting analysis and high precision, especially for micro lens curvature detection accuracy is high, the radius of curvature of 0.1% accuracy, and can be fitted out front, to evaluate the surface shape error, and can reverse the fitting precision of the sphere, aspheric lens surface, various mirror mirror, reflection angle and surface measurement error distribution.

The system can detect the surface error of any mirror surface, and the axial accuracy is higher than 1 mu m. It can be used in the measurement and evaluation of surface defects and deformation, and can also guide the surface restoration.